In this paper some regularities of formation of silicon oxide nanoparticles from TEOS in atmospheric pressure low temperature plasma are experimentally studied. It was demonstrated that the use of perforated flat electrodes covered with dielectric allows to use of pure argon to get glow RF discharge (α-region of discharge). The main regularities of nanoparticle synthesis process are common for helium and argon atmosphere. It is very probably that formation of nanoparticles occurs in the plasma generation region and formation of their agglomerates happens in the afterglow region.