β-Ti (TC6) structure formation during cold drawing and heat treatment is studied. With help of EBSD-analysis technique it was considered that cell subgrain structure with grain boundary angle 0,5–0,7° was formed after cold deformation. After heat treatment at temperature of 700 °С received structure was transformed to polygonized structure with grain boundary angle 0,45–0,55° and subgrain size 0,15–0,25 µm. Heat treatment at temperature of 800 °С leads to fine grain recrystallized structure formation.