Articles by keywords "OPERATING XY MICROSCOPE STAGE; BIMORPH PIEZOELECTRIC ACTUATOR; ACCURATE POSITIONING; PID CONTROLLER; COMPUTER MODELING; SYSTEM RESPONSE SPEED."

COMPUTER MODELING OF THE XY-STAGE WITH PIEZOELECTRIC ACTUATORS

Mechanical engineering
  • Year: 2016
  • Issue: 1
  • 201
  • 4891
  • Pages: 172-182