Articles by keywords "OPERATING XY MICROSCOPE STAGE; BIMORPH PIEZOELECTRIC ACTUATOR; ACCURATE POSITIONING; PID CONTROLLER; COMPUTER MODELING; SYSTEM RESPONSE SPEED." | Global Energy

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Articles by keywords "OPERATING XY MICROSCOPE STAGE; BIMORPH PIEZOELECTRIC ACTUATOR; ACCURATE POSITIONING; PID CONTROLLER; COMPUTER MODELING; SYSTEM RESPONSE SPEED."

COMPUTER MODELING OF THE XY-STAGE WITH PIEZOELECTRIC ACTUATORS

Mechanical engineering

Smirnov A. B. Diep Hoang Phi Polishchuck M.N.

Year: 2016
Issue: 1

202
6327
Pages: 172-182