Articles by keywords "OPERATING XY MICROSCOPE STAGE; BIMORPH PIEZOELECTRIC ACTUATOR; ACCURATE POSITIONING; PID CONTROLLER; COMPUTER MODELING; SYSTEM RESPONSE SPEED." | Global Energy

Global Energy

Global Energy Peter the Great St. Petersburg Polytechnic University

Since 1995

ISSN 2782-6724

Submit Your Paper

Articles by keywords "OPERATING XY MICROSCOPE STAGE; BIMORPH PIEZOELECTRIC ACTUATOR; ACCURATE POSITIONING; PID CONTROLLER; COMPUTER MODELING; SYSTEM RESPONSE SPEED."

COMPUTER MODELING OF THE XY-STAGE WITH PIEZOELECTRIC ACTUATORS

Mechanical engineering

Smirnov A. B. Diep Hoang Phi Polishchuck M.N.

Year: 2016
Issue: 1

201
5882
Pages: 172-182