Study of morfology of mocvd-processed nickel films from bis-(ethylcyclopentadienyl) nickel)

Metallurgy and materials technology. Mechanical engineering
Authors:
Protopopova Vera S. Alexandrov Sergey E. Shaganov Anton P. Lesin Sergey V.
Abstract:

Experimental investigation results of dependence of morphology and chemical composition of the deposition temperature were reported for nickel films processed from bis-(ethylcyclopentadieny) nickel by MOCVD. Formation of dense layer occurs in a narrow range of 800 K.