Formation of micrometer gauge fractal structures from silicon dioxide nanoparticle

Metallurgy and materials technology. Mechanical engineering

Experimental investigation results of morphology of fractal structures were reported for silicon dioxide nanoparticles processed from tetraethoxysilane by atmospheric pressure PECVD. Fractal dimension parameter of bidimensionals agglomerates formed on the substrate surface from nanoparticles were varied in the range 1,45–2.