Energy characteristics of molecular-viscous vacuum pumps

The paper discusses the components of energy costs for high-vacuum pumps, which also include molecular-viscous vacuum pumps, which are a new modern development. The principle of operation of molecular-viscous pumps allows them to operate in a wide pressure range, i.e., from high vacuum through to low. Due to changes in the range of operating pressures generated by the pump, there is a significant increase in the power of the pump motor (typically with an increase in pressure). At the moment there is no data about the energy consumption of these pumps. Analysis of the working conditions of the molecular-viscous vacuum pump in various ranges of pressures helped to identify the main factors influencing the change in the power and measures for decreasing it, for example, by redistribution of loads in the stages of multistage pumps, change of step lengths, rotation speeds of pump rotors. Reducing the energy costs of the pump will reduce the power consumption and cost of pumps, improving their operational efficiency.