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Global Energy
Global Energy
Peter the Great St. Petersburg Polytechnic University
Since 1995
ISSN 2782-6724
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COMPUTER MODELING OF THE XY-STAGE WITH PIEZOELECTRIC ACTUATORS
Mechanical engineering
Smirnov A. B.
Diep Hoang Phi
Polishchuck M.N.
Year: 2016
Issue: 1
202
7312
Pages: 172-182