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Articles by keywords "inductively coupled plasma"

SYNTHESIS OF ALUMINUM NITRIDE NANOPOWDER IN INDUCTIVELY COUPLED NITROGEN PLASMA

Metallurgy and Materials
Kim A. E. Ozerskoi N.E. Ermakov B.S. Popovich A.A.
  • Year: 2019
  • Volume: 25
  • Issue: 4
  • 51
  • 5327
  • Pages: 116-123