SYNTHESIS OF ALUMINUM NITRIDE NANOPOWDER IN INDUCTIVELY COUPLED NITROGEN PLASMA

Spherical nanopowders with an aluminum nitride content of 11.6 to 48.8 % have been obtained. The synthesis was carried out in an inductively coupled nitrogen plasma with a power of 15 kV. Pure aluminum micron powder (99.9 %) was used as the starting component. To increase the concentration of nitride, melamine was introduced into the plasma simultaneously with aluminum as an additional source of nitrogen. Using X-ray diffraction, qualitative and quantitative phase composition of the synthesized nanodispersed powders was studied. The morphology and size of the samples were studied using scanning electron microscopy and laser diffraction. The influence of different synthesis parameters (plasma-forming gas consumption, speed and point of supply of the initial powder into the plasma, etc.) on the final properties of the nanopowder is analyzed. A significant effect of the nitrogen-containing component and the feed rate of the powder into the plasma on the content of aluminum nitride in the synthesized powder have been established.